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SECS 协议:
SEMI设备通信标准第2部分(SECS-II)定义了智能设备和主机之间交换消息的解释细节。本规范是与日本电子工业发展协会设备通信委员会12合作制定的。
标准旨在与SEMI E4设备通信标准(SECS-I)完全兼容。其目的还在于允许与替代消息传输协议的兼容性。消息传输协议要求的详细信息包含在§6中。
标准旨在将消息定义为这样一个细节级别,即可以在对单个设备了解最少的情况下构建一些一致的主机软件。反过来,设备可以仅在对主机了解最少的情况下构建。
标准中定义的信息支持IC制造所需的最典型活动。本标准还规定了设备特定消息的定义,以支持标准消息未涵盖的活动。虽然某些活动可以由主机中的通用软件处理,但预计可能需要特定于设备的主机软件来支持设备的全部功能。
GEM 协议:
GEM为所有半导体制造设备定义了SECS-II的标准实施方式。GEM标准定义了一组通用的设备行为和通信能力,提供了支持半导体器件制造商的制造自动化程序的功能和灵活性。设备供应商可以提供GEM中未包含的额外SECS-II功能,只要该额外功能不与GEM中定义的任何行为或能力相冲突。这样的添加可以包括SECS-II消息、收集事件、警报、远程命令代码、处理状态、可变数据项(数据值、状态值或设备常数)、或对一类(etcher、stepper等)或设备的特定实例唯一的其他功能。
GEM旨在为设备制造商和设备供应商带来经济效益。
设备供应商受益于开发和营销单一SECS-II接口的能力,使大多数客户满意。设备制造商受益于所有制造设备中SECS-II接口功能的增强和标准化。这种标准化降低了设备供应商和设备制造商的软件开发成本。通过降低成本和增加功能,器件制造商可以更快、更有效地实现半导体工厂的自动化。GEM标准提供的灵活性还使设备制造商能够在通用的行业框架内实施独特的自动化解决方案。
有哪些选择?
中国国内有一家专注于做SECS/GEM解决方案的:广州金南瓜科技
① 支持C#、C++、C、Labview、Delphi、VB、QT
② 支持各种PLC和传感器,modbus tcp、opc ua、ethercat等
③ 使用方便,稳定可靠
④ 截止2023年6月份,已经有6000多台设备使用金南瓜SECS/GEM解决方案
⑤ 应用工厂覆盖国内所有终端,包括中芯国际、长江存储、士兰微、华天、三星、晟碟半导体、豪威等等
SECS/GEM的LOG是怎么样子的呢?
大量的用户使用,用户是对产品的认可最是好产品的标准
What are the options available?
There is a domestic company in China that specializes in SECS/GEM solutions: Guangzhou Golden Pumpkin Technology
① Supports C #, C++, C, Labview, Delphi, VB, QT
② Supports various PLCs and sensors, such as modbus TCP, OPC UA, Ethercat, etc
③ Easy to use, stable and reliable
④ As of June 2023, more than 6000 devices have been using the Golden Pumpkin SECS/GEM solution
⑤ The application factory covers all domestic terminals, including SMIC, Changjiang Storage, Silan Micro, Huatian, Samsung, Shengdian Semiconductor, Howei, and so on
The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of messages exchanged between intelligent equipment and a host. This Specification has been developed in cooperation with the Japan Electronic Industry Development Association Committee 12 on Equipment Communications.
It is the intent of this Standard to be fully compatible with SEMI E4, Equipment Communications Standard (SECS-I). It is also the intent to allow for compatibility with alternative message transfer protocols. The details of the message transfer protocol requirements are contained .
It is the intent of this Standard to define messages to such a level of detail that some consistent host software may be constructed with only minimal knowledge of individual equipment. The equipment, in turn, may be constructed with only minimal knowledge of the host.
GEM defines a standard implementation of SECS-II for all semiconductor manufacturing equipment. The GEM Standard defines a common set of equipment behavior and communications capabilities that provide the functionality and flexibility to support the manufacturing automation programs of semiconductor device manufacturers. Equipment suppliers may provide additional SECS-II functionality not included in GEM as long as the additional functionality does not conflict with any of the behavior or capabilities defined in GEM. Such additions may include SECS-II messages, collection events, alarms, remote command codes, processing states, variable data items (data values, status values or equipment constants), or other functionality that is unique to a class (etchers, steppers, etc.) or specific instance of equipment.
GEM is intended to produce economic benefits for both device manufacturers and equipment suppliers.
Equipment suppliers benefit from the ability to develop and market a single SECS-II interface that satisfies most customers. Device manufacturers benefit from the increased functionality and standardization of the SECS-II interface across all manufacturing equipment. This standardization reduces the cost of software development for both equipment suppliers and device manufacturers. By reducing costs and increasing functionality, device manufacturers can automate semiconductor factories more quickly and effectively. The flexibility provided by the GEM Standard also enables device manufacturers to implement unique automation solutions within a common industry framework.
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